Usages

Key Materials for Advanced Dry Etching Applications 

Cleanliness is crucial in dry etching, and materials used in these processes must be equipped with excellent chemical and heat resistance. Our innovative portfolio of specialty polymers impart several critical properties to improve dry etching tools and processes for efficient semiconductor fabrication. Syensqo offers a variety of solutions for dry etching fluids and lubricants and enhanced dry etching tools,  

Fluids and Lubricants

Fluids and lubricants used in semiconductor fabrication and dry etching must exhibit high temperature and chemical resistance to withstand the demanding conditions of these processes. Fomblin® PFPE lubricants offer an exceptional solution for vacuum pumps used during the dry etching process. Galden® PFPE, available in a variety of grades, is ideal for semiconductor chillers. 

Dry Etching Tools

Manufacturers of dry etching tools continually seek material solutions with plasma resistance, outstanding mechanical, chemical, and structural abilities, combined with unique design flexibility and processability. Tecnoflon® FKM & PFR FFKM provide an advanced material selection for o-rings and seals, while Ketaspire® PEEK is excellent for structural components in etching tools and Torlon® PAI is a preferred polymer for internal parts of plasma chambers.